
Axis Ultra DLD X-ray photoelectron spectroscopy provides quantitative chemical state information on the upper 1-10 nm of a surface.
Our Axis Ultra DLD is equipped with a monochromated Al-kα X-ray source, a Minibeam III allowing in situ sample cleaning and a spherical mirror analyser capable of mapping with a spatial resolution below 3 µm.

Basic Principle: An X-ray beam is focussed onto a surface resulting in the ejection of electrons with kinetic energies characteristic of the atoms and bonding environments they originate from.


Survey Spectra
The number of electrons is plotted as a function of binding energy to produce survey spectra.
These spectra show the elemental composition of a surface.
- identification of unknowns
- purity of substances
- extent of reaction


High Resolution Spectra
The binding energy of a photoelectron reflects the bonding environment it was emitted from.
Accurate measurement of peak positions after deconvolution of high resolution spectra provides quantitative chemical state information.
- oxidation states
- chemical bonding
- extent of reaction

Species Mapping can be performed on 200 - 800 µm2 areas with a spatial resolution below 3 µm. Small spot analysis can be carried out on areas as small as 15 µm to determine the elemental composition at specific regions of the surface.